SpletS1805 positive photoresist has been deposited on single crystalline Si wafers using a Suss MicroTec Alta Spray. The influence of flow rate, nozzle speed, pitch and number of … SpletThe SUSS MicroTec Gamma system is equipped with two wafer cassette stations for 200mm wafers. Different wafer sizes can be processed simultaneously without any mechanical changeover. Capabilities DUV …

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SpletSuss Gamma photoresist and wet processing system with AltaSpray Spray Coater. used. Manufacturer: SÜSS MicroTec; Model: Gamma; The Gamma automated photoresist and … SpletThe SUSS MicroTec RCD8 resist coater is supported by an extensive library of available chucks and configurations, ensuring all kind of substrate materials and shapes can be coated and developed in the machine; where a customer requirement falls outside the standard options, SUSS MicroTec’s experienced design team can easily adapt existing … icaew what does good look like

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SpletSuss Alta Spray Coater Information Contact Schedule Training Equipment Description The Georgia Tech SUSS MicroTec's proprietary AltaSpray coating technology is a unique … SpletSUSS MicroTec a leading supplier of Process Equipment ... with up to 19 plates or 2 wet process modules and 2 spray coater modules with up to 13 plates. With the possibility of stacking up to 3 plates over each wet process module and up to 7 plates in the 5th module, the ACS200 Gen3 allows the maximum module count in its class. ... SpletThe SUSS ACS200 Gen3 platform is the successful result of a perfect mix of innovative and production proven components. With the capability of up to 4 wet process modules and a maximum of 19 plates it perfectly suits the needs of high volume manufacturing (HVM). icaew whistleblowing